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Determining the strength of micro-beams without measuring forces or displacements

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3 Author(s)
D. Elata ; Technion, Israel Inst. of Technol., Haifa, Israel ; A. Hirshberg ; M. Naftali

It is demonstrated that the strength of brittle micro-beams can be measured without measuring any forces or displacements. A novel test device is presented in which the strength of brittle beams is directly deduced from their size after failure.

Published in:

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

Date of Conference:

30 Jan.-3 Feb. 2005