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Micromachined capacitive transducer arrays for intravascular ultrasound imaging

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2 Author(s)
Guldiken, R.O. ; G.W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Degertekin, F.L.

We designed, fabricated, and tested ring annular capacitive micromachined ultrasonic transducer (CMUT) arrays for forward looking intravascular ultrasound (IVUS) imaging in the 10-20MHz range. Our fabrication process uses low stress plasma enhanced chemical vapor deposition (PECVD) to form the silicon nitride membrane and provides localized vacuum sealing. The CMUT fabrication requires a maximum process temperature of 250°C enabling post-CMOS CMUT fabrication for electronics integration. Electrical and acoustic characterization results show that the process is repeatable and the response of 40 × 120μm CMUT elements of a lmm diameter array are suitable for IVUS imaging around 16MHz. We also present initial volumetric imaging experiments on different targets using a 32 element CMUT-based forward looking IVUS array and synthetic aperture image reconstruction techniques.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005