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Remote-powered high-performance strain sensing microsystem

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5 Author(s)
Suster, M. ; Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA ; Chaimanonart, N. ; Jun Guo ; Ko, W.H.
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This paper presents an RF remote-powered high-performance strain sensing microsystem. A MEMS capacitive strain sensor converts an input strain to a capacitance change, followed by low-noise integrated sensing electronics converting the capacitive signal to an output voltage with an overall sensitivity of 420 μV/με. An RF to DC converter based on inductive coupled coils converts a 50 MHz AC signal to a stable DC supply of 2.8 V with a current driving capability of 2 mA, sufficient to power the interface sensing electronics. The prototype microsystem achieves a minimum detectable strain of 0.09 HE over a 10 kHz bandwidth with a dynamic range of 81 dB. The sensing electronics consume 1.5 mA from a 2.8 V supply.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005