By Topic

A new input switching scheme for a capacitive micro-g accelerometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Amini, B.V. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Pourkamali, S. ; Zaman, M. ; Ayazi, F.

The design and implementation of a new input switching capacitive microaccelerometer interface circuit with μg resolution is presented. The accelerometers were fabricated on 50 μm thick silicon-on-insulator (SOI) substrates using a two-mask, dry-release and low temperature process. Fabricated devices were interfaced with a high resolution, low noise and low power switched-capacitor integrated circuit (IC) implemented in a 2.5V 0.25 μm N-well CMOS process with the chip size of 0.5×1.3mm2. The measured sensitivity is 0.45V/g and the output noise floor is 4.4μg/√Hz at 150Hz. The total power consumption is 5mW.

Published in:

VLSI Circuits, 2004. Digest of Technical Papers. 2004 Symposium on

Date of Conference:

17-19 June 2004