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Browse Journals & Magazines > Photonics Technology Letters, ...> Volume:16 Issue:9 Help

Optical microelectromechanical system array for free-space retrocommunication

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2 Author(s)
Luo, C. ; Dept. of Electr. & Comput. Eng., Univ. of Delaware, Newark, DE, USA ; Goossen, K.W.

We demonstrate here an optical link for free-space retrocommunication based on an optical microelectromechanical system array with a structure of mechanically active antireflection switch using a thin Si3N4 membrane. The array consists of 215 identical single devices with a total active area of 36 mm2 and was fabricated with the normal surface sacrificial micromachining. An overfilled reflectance contrast of 3 dB was observed at 6328 Å and a data rate of 100 kb/s shown in 50 mtorr vacuum. A design tradeoff between the high optical filling factor and the high working frequency is discussed.

Published in:
Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 9 )

Date of Publication: Sept. 2004

Page(s):
2045 - 2047
ISSN :
1041-1135
INSPEC Accession Number:
8086552
Digital Object Identifier :
10.1109/LPT.2004.831947
Product Type:
Journals & Magazines
Date of Current Version :
24 August 2004
Issue Date :
Sept. 2004
Sponsored by :
IEEE Photonics Society

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