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We demonstrate here an optical link for free-space retrocommunication based on an optical microelectromechanical system array with a structure of mechanically active antireflection switch using a thin Si3N4 membrane. The array consists of 215 identical single devices with a total active area of 36 mm2 and was fabricated with the normal surface sacrificial micromachining. An overfilled reflectance contrast of 3 dB was observed at 6328 Å and a data rate of 100 kb/s shown in 50 mtorr vacuum. A design tradeoff between the high optical filling factor and the high working frequency is discussed.
Date of Publication: Sept. 2004