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A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted ±4° about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from ∞ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.
Selected Topics in Quantum Electronics, IEEE Journal of (Volume:10 , Issue: 3 )
Date of Publication: May-June 2004