A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted ±4° about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from ∞ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:10
,
Issue:
3
)
Date of Publication: May-June 2004