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3-D MOEMS mirror for laser beam pointing and focus control

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3 Author(s)
Yuhe Shao ; Electr. & Comput. Eng. Dept., Montana State Univ.-Bozeman, Bozeman, MT, USA ; Dickensheets, D.L. ; Himmer, P.

A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted ±4° about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from ∞ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.

Published in:
Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:10 ,  Issue: 3 )

Date of Publication: May-June 2004

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