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Matrix combination of MEMS relays

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6 Author(s)
Fabian, J.-H. ; Corp. Res., ABB Switzerland Ltd., Baden, Switzerland ; Niayesh, K. ; Kotilainen, S. ; Wapelhorst, E.
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This paper reports the feasibility of parallel-series (matrix) combination of micro relays to extend their electrical power handling and current interruption capabilities. Conditions for a stable operation of a micro switch matrix are derived and the performance features of an elementary MEMS switch for matrix operation are specified.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004