Cart (Loading....) | Create Account
Close category search window
 

Measurement of the nonlinear behavior of a MEMS variable capacitor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

Recently, we published a theoretical analysis of the nonlinear behavior of a MEMS variable capacitor, but until now these formulas where not confirmed with measurements. This paper shows for the first time a linearity measurement of a single MEMS varicap both as function of the frequency and as function of the bias voltage. The linearity is determined in a two-tone experiment in which two sinusoidal signals are applied to the device. The measurement is done on a series capacitor because it has a lower dynamic range requirement for the spectrum analyzer and the measurements can be done at a lower frequency than for the shunt configuration. However, at high frequency difference, the linearity becomes so high that it is difficult to measure due to the limitations of the measurement equipment. The measurement results confirm the mathematical analysis of. The linearity of a varicap decreases with increasing bias voltage and increases with increasing frequency difference between the two applied tones.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.