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Micro-patterned electret for high power electrostatic motor

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3 Author(s)
Genda, T. ; Dept. of Mech. & Precision Eng., Tohoku Univ., Sendai, Japan ; Tanaka, S. ; Esashi, M.

This paper describes the charging method of a micro-patterned electret for a high power electrostatic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO2 with fair repeatability.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004