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Monolithic integration of microfluidic channels and optical waveguides using a photodefinable epoxy

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9 Author(s)
Ruano, J.M. ; MEMS-MST Dept., Ikerlan S. Koop, Arrasate, Spain ; Aguirregabiria, M. ; Tijero, M. ; Arroyo, M.
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This work describes a novel use of a photodefinable epoxy to monolithically integrate low cost optical-microfluidic sensor devices. The chip consists of multimode waveguides, sealed microchannels and optical connectors on a silicon wafer. The process consists of (i) 4 successive photolithographic steps, (ii) a bonding process, (iii) and a final releasing step. The core of the waveguide is made of SU8 in a liquid aliphatic epoxy resin. Despite the dilution, the SU8:aliphatic epoxy is still able to be patterned by photolithography.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004