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Ultra-thin multilayer nanomembranes for short wavelength deformable optics

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4 Author(s)
M. K. Tripp ; Dept. of Mech. Eng., Colorado Univ., Boulder, CO, USA ; C. F. Herrmann ; S. M. George ; V. M. Bright

Due to their unique optical properties, deformable multilayer membranes are of interest for adaptive optics. In this paper, we present the fabrication and characterization of a deformable membrane with nanometer scale thickness. This work explores the creation of adaptive optics out of multilayer thin films deposited using atomic layer deposition (ALD). SOIMUMPs, ALD, flip-chip assembly, and xenon difluoride (XeF2) etching are used in the fabrication process. An assembled device is presented along with an electro-static characterization and interferograms to examine the deformable nature of the membrane surface. To our knowledge these are the first microstructures created with the ALD technique.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

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