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MEMS for a watches

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7 Author(s)
Noell, W. ; Inst. of Microtechnol., Univ. of Neuchatel, Neuchatel, Switzerland ; Clerc, P.-A. ; Jeanneret, S. ; Hoogerwerf, A.
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In order to make new mechanical watch movements possible as well as adding new functions to wristwatches, MEMS, UV-LIGA, and silicon micromachining have become indispensable technologies in the watch industries. Examples presented here are deep reactive ion etching (DRIE) of silicon gears, SU-8 based UV-LIGA and MEMS based pressure and magnetic sensors. This article provides a brief overview of some recent commercialized technologies in Switzerland.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

25-29 Jan. 2004

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