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The paper presents nondestructive method of investigation of multilayer structures containing conducting material, such as thyristor structures. The proposed method is based on induction heating of examined object and infrared detection of temperature field. Infrared images of examined thyristor structures registered with the help of this method are presented. Short discussion of advantages and disadvantages of the method is also included. The main benefit from usage of the proposed method is extremely short time of registration. Therefore, this method can be applied in industry for quick quality assessment of thyristor structures. Moreover, the source of excitation does not dazzle the infrared detector. Obtained preliminary results confirm usability of the method.