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Information about the random behavior of the IC manufacturing process can be applied for IC and process design tasks. In this paper a methodology for modeling random fluctuations of IC manufacturing process is proposed. A simulator of a complete bipolar manufacturing process called FABRICS, is described. A few applications illustrating advantages of the proposed statistical process modeling method are discussed.
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on (Volume:1 , Issue: 3 )
Date of Publication: July 1982