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Reverse-order source/drain formation with double offset spacer (RODOS) for low-power and high-speed application

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5 Author(s)
Woo Young Choi ; Inter-Univ. Semicond. Res. Center, Seoul Nat. Univ., South Korea ; Byung-Yong Choi ; Dong-Soo Woo ; Jong Duk Lee
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We proposed "reverse-order source/drain formation with double offset spacer" (RODOS) structure for low-power and high-speed applications. Both simulation and experimental data were used to evaluate the potential of the structure. It showed improved performance in terms of poly-depletion effect, dc characteristics, gate delay (CV/I), switching energy (CV2) and linearity (VIP3). It satisfied all the requirements of LOP and LSTP for 90 nm technology node in ITRS 2002. Simulation predicted 794 μA/μm in on-current, 0.1 nA/μm in off-current, 65 mV/V in DIBL, 80 mV/dec in SS, 1.29 ps in gate delay, 198 GHz in fT and 0.151 fJ in switching energy in addition to enhanced linearity. Finally, we confirmed the high feasibility and potential of the RODOS MOSFET's for low-power and high-speed applications such as an LNA in portable communication appliances.

Published in:

IEEE Transactions on Nanotechnology  (Volume:2 ,  Issue: 4 )