By Topic

Distributed performance evaluation of a controlled IC fab

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Chung-Hsien Kuo ; Dept. of Mech. Eng., Nat. Taiwan Univ., Taiwan ; Han-Pang Huang

Integrated circuit (IC) foundry fabs are difficult to model due to the increasing product mixes and flexible routes. An imprecise fab model cannot be used to evaluate fab performance or estimate product cycle time. The distributed colored timed Petri net (DCTPN) is a type of high-level Petri net with embedded entity attribute, time, communication, and remote object invocation properties that contribute to realistic descriptions, distributed modeling, and manufacturing execution system integration. Furthermore, the resource-oriented DCTPN modeling extends product mix and flexible route modeling capabilities. The DCTPN conflict resolution and token competition rules are used to construct the dispatching system for a controlled IC fab. A simplified 200 mm IC fab with six functional areas is discussed and demonstrated based on different control policies.

Published in:

Robotics and Automation, IEEE Transactions on  (Volume:19 ,  Issue: 6 )