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An electrometric method to measure the mechanical parameters of MEMS devices

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3 Author(s)
Li Jiang ; Dept. of Precision Instruments & Mechanology, Tsinghua Univ., Beijing, China ; Gao Zhongyu ; Dong Jingxin

It is difficult to acquire the actual mechanical parameters of comb-finger MEMS devices, for its sensing element has special structure. In order to derive the parameters, such as the proof mass m, the equivalent distance d0 between fingers, and the mechanical stiffness km, a static electrometric method is investigated. The method includes two experiments, the electrostatic force experiment and the open loop frequency response experiment, and the values of d0, d0, and km can be calculated with the electrical variables in the experiments. The experimental results show that the actual mechanical parameters of the sensing element can be estimated with a high accuracy. It is a convenient and useful method to be used in the fieldwork without the special requirement of environment and costly facilities.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002

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