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A multi-step electromechanical /spl Sigma//spl Delta/ converter for micro-g capacitive accelerometers

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4 Author(s)
H. Kulah ; Center for Wireless Integrated MicroSystenns, Michigan Univ., Ann Arbor, MI, USA ; Junseok Chae ; N. Yazdi ; K. Najafi

A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta/ loops and resolution improves by >2x compared to a conventional 2nd-order /spl Sigma//spl Delta/ modulator. This CMOS chip operates at 1 MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

Published in:

Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International

Date of Conference:

13-13 Feb. 2003