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New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

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4 Author(s)
M. Pizzi ; Centro Ricerche, Orbassano, Italy ; V. Koniachkine ; O. De Martiis ; R. Marbach

A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003