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Micromirrors are assembled onto actuator sockets using MEMS assembly techniques to realize a shutter and beam steering VOA. The shutter mirror moves more than 45 microns at 10.6 volts and the angular mirror rotates 4.85° at 8.32 volts.
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003