Referenced Items are not available for this document.
Micromirrors are assembled onto actuator sockets using MEMS assembly techniques to realize a shutter and beam steering VOA. The shutter mirror moves more than 45 microns at 10.6 volts and the angular mirror rotates 4.85° at 8.32 volts.
Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003
- Page(s):
- 139 - 140
- Print ISBN:
- 0-7803-7830-X
- INSPEC Accession Number:
- 7970746
- Digital Object Identifier :
- 10.1109/OMEMS.2003.1233505
- Product Type:
- Conference Publications
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