By Topic

Silicon based optical scanner using PDMS as torsion springs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

Optical scanners made by MEMS technology have been studied since the beginning of the 80's. However, there has been an increasing interest for optical scanners having a large mirror, i.e. several millimetres square. The large mirror is needed in some industrial applications where a cheap laser source with a spot size of 5 mm in diameter, and simple optical parts are used. In order to achieve large mechanical angles with robustness, the proposed device uses the soft silicon based polymer PDMS for the torsion springs of the scanner.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003