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Temperature stability of the frequency of a resonant micro scanning mirror

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4 Author(s)
A. Wolter ; Fraunhofer-Inst. Photonische Mikrosysteme, Dresden, Germany ; H. Korth ; H. Schenk ; H. Lakner

Investigation of our bulk-micromachined resonant micro MEMS-scanner revealed that the eigen-frequency of 250 Hz varied within a range of only 0.1% during a temperature cycle between 10°C and 60°C at ambient atmosphere. Results of the study show that packaging is crucial.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003