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47 nm tuning of thermally actuated Fabry-Perot tunable filter with very low power consumption

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4 Author(s)
Chang Kyu-Kim ; Basic Res. Lab., Electron. & Telecommun. Res. Inst., Daejeon, South Korea ; Myung-Lae Lee ; Chi-Hoon Jun ; Youn Tae Kim

A thermally actuated GaAs-based wavelength tunable filter with 7.64-μm-thick suspended structure is presented. Wide tuning range of 74 nm is achieved with the low driving voltage 4.6 V and the power consumption of 4.97 mW.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003