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A MEMS-actuated tunable microdisk resonator

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2 Author(s)
Lee, Ming-Chang M. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Wu, M.C.

A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8 dB and a quality factor of 6200.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003