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A two-axis electrothermal SCS micromirror for biomedical imaging

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5 Author(s)
A. Jain ; Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA ; Tuqiang Xie ; Yingtian Pan ; G. K. Fedder
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This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by a deep-reactive-ion-etch post-CMOS micromachining process.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003