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The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach ±0.5 μm when the input voltage is ±20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.
Date of Publication: Sept. 2003