Referenced Items are not available for this document.
The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach ±0.5 μm when the input voltage is ±20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.
Published in:
Magnetics, IEEE Transactions on
(Volume:39
,
Issue:
5
)
Date of Publication: Sept. 2003
- Page(s):
- 2240 - 2242
- ISSN :
- 0018-9464
- INSPEC Accession Number:
- 7778295
- Digital Object Identifier :
- 10.1109/TMAG.2003.815443
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 23 September 2003
- Issue Date :
- Sept. 2003
- Sponsored by :
- IEEE Magnetics Society
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