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Bulk micromachined pressure sensor

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2 Author(s)
L. F. Fuller ; Microelectron. Eng., Rochester Inst. of Technol., NY, USA ; S. Sudirgo

Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.

Published in:

University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial

Date of Conference:

30 June-2 July 2003