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Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches

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4 Author(s)
Jui-che Tsai ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; S. Huang ; D. Hah ; M. C. Wu

A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N/sup 2/, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>/spl plusmn/5/spl deg/ mechanical), low drive voltages (7 V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1/spl times/8 (3/spl times/3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 /spl mu/sec have been achieved.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003