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Thermal based angle fixing for micromirrors

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2 Author(s)
Jianglong Zhang ; Reflectivity Inc., Sunnyvale, CA, USA ; Lee, Y.C.

This paper presents an angle fixing method used for micromirrors in the manufacturing misalignment adjustment system, such as laser-to-fiber coupling module. Micromirror devices with angle fixing by thermal fusion are first demonstrated. The experimental results of micromirrors with thermal based angle fixing are investigated and addressed. Three different angles are fixed with a maximum 0.10/spl deg/ angle change after the angle fixing. Finite element models with accurate material properties are developed to simulate the process. Guided by the model, the tilting angle shift can be reduced to 0.07/spl deg/ by changing microbridge and plate configurations.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003

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