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Development of polymer-based artificial haircell using surface micromachining and 3D assembly

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3 Author(s)
Chen, J. ; Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA ; Engel, J. ; Chang Liu

We report the development of an artificial haircell (AHC) fabricated using polymer surface micromachining and efficient 3D assembly. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design and fabrication process are discussed in the paper. Response to static deflection and airflow is also discussed.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003