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This paper describes process development, fabrication and testing of piezoelectric micro actuators based on a novel polymer-composite technology. Fabrication is done by using segmented silicone molds for the insert-casting of piezoactuators into polymeric material. Furthermore, a simulation model was developed to forecast the principal behavior of the micro actuators and to perform an optimization of the stroke. Based on these results, a number of test structures were fabricated. Finally the displacement was measured and compared to the simulation model.
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (Volume:2 )
Date of Conference: 8-12 June 2003