Referenced Items are not available for this document.
This paper describes process development, fabrication and testing of piezoelectric micro actuators based on a novel polymer-composite technology. Fabrication is done by using segmented silicone molds for the insert-casting of piezoactuators into polymeric material. Furthermore, a simulation model was developed to forecast the principal behavior of the micro actuators and to perform an optimization of the stroke. Based on these results, a number of test structures were fabricated. Finally the displacement was measured and compared to the simulation model.
Published in:
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
(Volume:2
)
Date of Conference: 8-12 June 2003
- Page(s):
- 1007 - 1010 vol.2
- Print ISBN:
- 0-7803-7731-1
- INSPEC Accession Number:
- 7929060
- Conference Location :
- Boston, MA, USA
- Digital Object Identifier :
- 10.1109/SENSOR.2003.1216938
- Product Type:
- Conference Publications
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