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Piezoelectric microactuators in polymer-composite technology

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3 Author(s)
C. Friese ; Inst. for Microsyst. Technol., Albert-Ludwigs-Univ., Freiburg, Germany ; F. Goldschmidtboing ; P. Woias

This paper describes process development, fabrication and testing of piezoelectric micro actuators based on a novel polymer-composite technology. Fabrication is done by using segmented silicone molds for the insert-casting of piezoactuators into polymeric material. Furthermore, a simulation model was developed to forecast the principal behavior of the micro actuators and to perform an optimization of the stroke. Based on these results, a number of test structures were fabricated. Finally the displacement was measured and compared to the simulation model.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003