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Integrated niobium thin film air bridges as variable capacitors for superconducting GHz electronic circuits

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2 Author(s)
Schicke, M.. ; Inst. for Radio Astron. in the Millimeter Range, St. Martin d''Heres, France ; Schuster, K.F.

Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:13 ,  Issue: 2 )