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Microwave coplanar filters on Si substrates

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9 Author(s)
K. T. Chan ; Dept. of Electron. Eng, Nat. Chiao Tung Univ, Hsinchu, Taiwan ; A. Chin ; J. T. Kuo ; C. Y. Chang
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High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrates using a proton implantation process. Very good insertion loss and filter characteristics close to ideal EM simulation are measured that demonstrate excellent filter performance to 91 GHz.

Published in:

Microwave Symposium Digest, 2003 IEEE MTT-S International  (Volume:3 )

Date of Conference:

8-13 June 2003