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Microwave coplanar filters on Si substrates

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9 Author(s)
Chan, K.T. ; Dept. of Electron. Eng, Nat. Chiao Tung Univ, Hsinchu, Taiwan ; Chin, Albert ; Kuo, J.T. ; Chang, C.Y.
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High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrates using a proton implantation process. Very good insertion loss and filter characteristics close to ideal EM simulation are measured that demonstrate excellent filter performance to 91 GHz.

Published in:
Microwave Symposium Digest, 2003 IEEE MTT-S International  (Volume:3 )

Date of Conference: 8-13 June 2003

Page(s):
1909 - 1912 vol.3
ISSN :
0149-645X
Print ISBN:
0-7803-7695-1
INSPEC Accession Number:
7686322
Digital Object Identifier :
10.1109/MWSYM.2003.1210531
Product Type:
Conference Publications

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