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High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrates using a proton implantation process. Very good insertion loss and filter characteristics close to ideal EM simulation are measured that demonstrate excellent filter performance to 91 GHz.
Microwave Symposium Digest, 2003 IEEE MTT-S International (Volume:3 )
Date of Conference: 8-13 June 2003