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3D silicon micromachined RF resonators

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5 Author(s)
Strohm, K.M. ; DairnlerChrysler Res. Center, Ulm, Germany ; Schmuckle, F.J. ; Yaglioglu, O. ; Luy, J.-F.
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Passive components with high quality factor are required for many applications, e.g., filters. In the field of micromachining, this is commonly achieved by using multiple-wafer structures. An alternative technique is presented here together with design and measurement data, which is based on MEMS technology and yields single-wafer resonators thus reducing costs. Cavity resonators with the Si being partly removed show quality factors Q beyond 360.

Published in:

Microwave Symposium Digest, 2003 IEEE MTT-S International  (Volume:3 )

Date of Conference:

8-13 June 2003