Referenced Items are not available for this document.
Presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 μm and has been observed to move about 0.7 μm over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA.
Published in:
Components and Packaging Technologies, IEEE Transactions on
(Volume:25
,
Issue:
3
)
Date of Publication: Sep 2002
- Page(s):
- 397 - 401
- ISSN :
- 1521-3331
- INSPEC Accession Number:
- 7485967
- Digital Object Identifier :
- 10.1109/TCAPT.2002.804611
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 January 2003
- Issue Date :
- Sep 2002
- Sponsored by :
- IEEE Components, Packaging, and Manufacturing Technology Society
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