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A Comparison of the Strength of Alumina Substrates for Different Separation Techniques

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2 Author(s)
D. Schroeder ; Sandia Laboratories, Albuquerque, N. Mex. ; F. English

Carbon dioxide lasers arc widely used to separate alumina sheet into individual substrates for hybrid microcircuits. Laser separation offers several advantages over other conventional techniques; however, the effects on the flexural strength of the alumina have not previously been investigated. The flexural strength of alumina substratas separated by CO2, Q-switched YAG, and pulsed YAG lasers and diamond sewing are compared. The Q-switched YAG laser technique produced substrates 45 percent stronger than the CO2and pulsed YAG laser techniques, and 13 percent stronger than the diamond saw method.

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IEEE Transactions on Parts, Hybrids, and Packaging  (Volume:8 ,  Issue: 3 )