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A comprehensive CAM environment for fast-turn IC prototyping

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2 Author(s)
C. B. Barnum ; Massachusetts Microelectron. Center, Westborough, MA, USA ; D. J. Cunningham

A prototype integrated-circuit (IC) computer-aided-manufacturing (CAM) environment to support university education and research programs is described. The CAM system, mask making, and wafer fabrication are discussed. Process controls and the assembly process are described

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Date of Conference:

11-12 Sep 1990