Two instruments for viewing small structures are reviewed. The theory, construction, and microfabrication of the scanning tunneling microscope and the atomic force microscope are discussed. Some results are included
Published in:
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Date of Conference:
11-14 Feb 1990
- Page(s):
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188
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191
- Meeting Date :
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11 Feb 1990-14 Feb 1990
- INSPEC Accession Number:
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3764185
- Conference Location :
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Napa Valley, CA
- Digital Object Identifier :
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10.1109/MEMSYS.1990.110274
- Product Type:
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Conference Publications