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Micro electrostatic actuator with three degrees of freedom

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2 Author(s)
Fukuda, T. ; Dept. of Mech. Eng., Nagoya Univ., Japan ; Tanaka, T.

A micro electrostatic actuator with three degrees of freedom, which can be applied to a micromanipulator is discussed. This actuator has a flat surface with quad electrodes, all of which can be regulated by voltages. Two types of microactuators made from different processes but consisting of similar structure and function are reported. This actuator has a millimeter order of size, but will be able to be miniaturized to a much smaller size without any changes to the fabrication methodology. A micro-probe made of silicon is attached at the tip of the actuator. The motion of the actuator tested in the static mode is described

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990