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CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems

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2 Author(s)
Crary, S. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Zhang, Y.

A summary of a proposed computer-aided engineering system for micro-electro-mechanical systems is presented. The system will take advantage of existing high-level integrated mechanical engineering software tools and add application-specific software for the system to function as a MEMS-specific designers' workbench environment. The system, called CAEMEMS, will include database structures (MEMS Databases); a process modeler that can model MEMS-relevant process sequences (MEMS CAD); and a device modeler that can perform finite-element simulations, link individual devices together through appropriate matrix operations, and perform simulations of entire mechanical systems (MEMS Sim)

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990