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A perturbation method for calculating the capacitance of electrostatic motors

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2 Author(s)
Kumar, S. ; Dept. of Mech. & Aerosp. Eng., Princeton Univ., NJ, USA ; Cho, D.

This method does not make the assumption of infinite sets of conducting lands to introduce spatial periodicity. The perturbation method is computationally efficient and can be used for any design, including those that use very few repeated sets of conducting lands. The results obtained by this method are compared with previous results which include experimental data. The method is extended to rotary micromotors and to three-dimensional problems

Published in:

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Date of Conference:

11-14 Feb 1990