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Automatic generation of a 3-D solid model of a microfabricated structure

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3 Author(s)
Harris, R.M. ; Microsyst. Technol. Lab., MIT, Cambridge, MA, USA ; Maseeh, F. ; Senturia, S.D.

The automatic construction of a 3-D solid model from a specification of mask layout and process sequence is demonstrated. The process sequence consists of planar deposition and masked etch. The generated 3-D solid model is directly usable by mechanical CAD software and is used to do a deformation analysis of the structure. An overview of the CAD system is given, and the structure simulator is described in detail.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE

Date of Conference:

4-7 June 1990