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An experimental study of the levitation force, normal to the substrate, associated with interdigital capacitor electrostatic comb lateral actuators is reported. For compliant suspensions, normal displacements of over 2 mu m for a comb bias of 30 V were observed. This phenomenon is due to electrostatic repulsion by image charges mirrored in the ground plane beneath the suspended structure. By electrically isolating alternating drive-comb fingers and applying voltages of equal magnitude and opposite sign, levitation can be reduced by an order of magnitude while reducing the lateral drive force by less than a factor of two.<
Published in:
Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE
Date of Conference: 4-7 June 1990
- Page(s):
- 23 - 27
- Meeting Date :
- 04 Jun 1990-07 Jun 1990
- INSPEC Accession Number:
- 3907843
- Conference Location :
- Hilton Head Island, SC, USA
- Digital Object Identifier :
- 10.1109/SOLSEN.1990.109812
- Product Type:
- Conference Publications
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