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Defect size variations and their effect on the critical area of VLSI devices

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1 Author(s)

The effect on VLSI device yield of variations in the size of defects has not been widely recognized until recently, when the theory of critical areas and fault probabilities was developed. It is shown that assumptions regarding the defect size distribution can substantially affect the computed critical area.

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Solid-State Circuits, IEEE Journal of  (Volume:20 ,  Issue: 4 )