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Accurate metallization capacitances for integrated circuits and packages

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2 Author(s)

The parallel-plate formula is widely used by the solid-state circuit designer to estimate capacitances in integrated circuits. Since considerable errors may result from using this approximation, this correspondence gives correction curves for a wide range of parameters. It is shown that the finite conductor thickness may significantly contribute to the increase in capacitance.

Published in:

IEEE Journal of Solid-State Circuits  (Volume:8 ,  Issue: 4 )