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Cobalt dot arrays are fabricated by Ga+ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.
Date of Publication: Sep 2002