High-performance InSb micro-Hall sensors were fabricated by optical lithography and incorporated in a room-temperature scanning Hall probe microscope for imaging of localized magnetic fluctuations in close proximity to the surfaces of crystalline uniaxial garnet films. The room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which is an order of magnitude. better than GaAs-AlGaAs two-dimensional electron gas sensors used to date.
Published in:
Magnetics, IEEE Transactions on
(Volume:38
,
Issue:
5
)
Date of Publication: Sep 2002