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High-performance InSb micro-Hall sensors were fabricated by optical lithography and incorporated in a room-temperature scanning Hall probe microscope for imaging of localized magnetic fluctuations in close proximity to the surfaces of crystalline uniaxial garnet films. The room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which is an order of magnitude. better than GaAs-AlGaAs two-dimensional electron gas sensors used to date.
Date of Publication: Sep 2002