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Microfabrication of high-aspect ratio and complex monolithic structures in glass

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4 Author(s)
Belloy, E. ; Inst. of Microelectron. & Microsystems, Swiss Fed. Inst. of Technol., Lausanne, Switzerland ; Pawlowski, A.-G. ; Sayah, A. ; Gijs, M.A.M.

We present a novel approach for the realization of complex three-dimensional microstructures in brittle materials, like glass. Our technology is based on a beam of eroding powder particles, etching a masked rotating substrate. By using an oblique powder beam and mask under-etching effects, we fabricate monolithic millimeter-high microstructures with an aspect ratio of 5 to 10. This intrinsically very simple microfabrication method also allows to realize in a unique way free-standing monolithic glass microstructures, suspended over many millimeters.

Published in:

Microelectromechanical Systems, Journal of  (Volume:11 ,  Issue: 5 )