Electrostatic problems in TFT-LCD production and solutions using ionization

The liquid crystal display (LCD) has a multilayered structure combining insulating materials and electronic circuit devices. Many LCD production methods are accompanied by friction, movement, and separation of materials. It is difficult to avoid static charge generation and the resulting electrostatic problems of particle attraction and electrostatic discharge (ESD). This paper describes the problems caused by static charge in LCD manufacturing, and control measures using ionization.