Microelectrodischarge machining for MEMS applications

The accuracy of micro-hole production is dependent on the way in which micro-electrode production is carried out. We are now encountering the problem of material microdefects that are becoming significant in microengineered products made from multicrystalline metals. The quality of the print head is dependent therefore not only on the micromachining processes involved in its fabrication but also on the quality of the material from which it is made. The micro-EDM process is excellent for its precision and resolution capabilities but major challenges are: wear of the micro-electrode during the machining of the nozzles and the very slow machining rate due to the low pulse energy used for individual discharges.